US Patent Issued to Applied Materials on March 31 for "Fluoride coating to improve chamber performance" (American, Indian Inventors)

ALEXANDRIA, Va., March 31 -- United States Patent no. 12,592,364, issued on March 31, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Fluoride coating to improve chamber performance" was invented by Jennifer Y. Sun (Fremont, Calif.), Ren-Guan Duan (Fremont, Calif.), Gayatri Natu (Mumbai, India), Tae Won Kim (San Jose, Calif.), Jiyong Huang (Rockwall, Texas), Nitin Deepak (Mumbai, India), Paul Brillhart (Pleasanton, Calif.), Lin Zhang (San Jose, Calif.), Yikai Chen (San Jose, Calif.), Sanni Sinikka Seppala (Santa Clara, Calif.), Ganesh Balasubramanian (Fremont, Calif.), JuanCarlos Rocha (Fremont, Calif.), Shankar Venkataraman (San Jose, Calif.) and Katherine Elizabeth Woo (Santa Clara, Calif.).

According to the abstract* rel...