US Patent Issued to Applied Materials on March 31 for "Filter isolation for reduced startup time in low relative humidity equipment front end module" (Texas Inventors)

ALEXANDRIA, Va., March 31 -- United States Patent no. 12,589,345, issued on March 31, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Filter isolation for reduced startup time in low relative humidity equipment front end module" was invented by Steven Trey Tindel (Austin, Texas) and Paul B. Reuter (Austin, Texas).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed herein are systems and methods for reducing startup time of an equipment front end module (EFEM). The EFEM may include an EFEM chamber formed between a plurality of walls, an upper plenum at a top of the EFEM, the upper plenum in fluid communication with the EFEM chamber, a plurality of ducts that provide a return gas flow path e...