ALEXANDRIA, Va., March 3 -- United States Patent no. 12,564,974, issued on March 3, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Factory interface with redundancy" was invented by Paul Benjamin Reuter (Austin, Texas), Kristen Ikeda (Santa Clara, Calif.), Sushant S. Koshti (Sunnyvale, Calif.) and Jeffrey C. Hudgens (San Francisco).
According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing system for an electronic device manufacturing system can include a factory interface forming an interior volume, and a partition disposed in the factory interface. The partition can divide the interior volume into a first factory interface chamber forming a second interior volume, and a second fac...