US Patent Issued to Applied Materials on March 24 for "Substrate support characterization to build a digital twin" (California Inventors)

ALEXANDRIA, Va., March 24 -- United States Patent no. 12,585,232, issued on March 24, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Substrate support characterization to build a digital twin" was invented by Vivek Bharat Shah (Santa Clara, Calif.), Chunlei Zhang (Santa Clara, Calif.) and Anders Andelman Nottrott (Alameda, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method includes receiving data indicative of properties of a substrate support from one or more sensors of a removable sensor assembly disposed proximate to the substrate support. The method further includes providing data based on the data indicative of properties of a substrate support to a physics-based model of the...