US Patent Issued to Applied Materials on March 24 for "Low mass substrate support" (Arizona, California Inventors)

ALEXANDRIA, Va., March 24 -- United States Patent no. 12,584,240, issued on March 24, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Low mass substrate support" was invented by Shawn Joseph Bonham (Mesa, Ariz.), Xinning Luan (Tempe, Ariz.), Hui Chen (Tempe, Ariz.), James M. Amos (Apache Junction, Ariz.), John Newman (Chandler, Ariz.), Kirk Allen Fisher (Tempe, Ariz.), Aimee S. Erhardt (Tempe, Ariz.), Philip Michael Amos (Apache Junction, Ariz.), Zhiyuan Ye (San Jose, Calif.), Shu-Kwan Lau (Sunnyvale, Calif.) and Lori D. Washington (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and apparatus for a reduced mass substrate support are disclosed, according to certain embo...