US Patent Issued to Applied Materials on March 24 for "Bipolar electrostatic chuck electrode with self-induced DC voltage" (California Inventors)

ALEXANDRIA, Va., March 24 -- United States Patent no. 12,588,469, issued on March 24, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Bipolar electrostatic chuck electrode with self-induced DC voltage" was invented by Jian Li (Fremont, Calif.), Deenesh Padhi (Saratoga, Calif.), Abhishek Kumar Verma (Santa Clara, Calif.), Kallol Bera (Fremont, Calif.), Juan Carlos Rocha-Alvarez (San Carlos, Calif.), Wenhao Zhang (San Jose, Calif.) and Ganesh Balasubramanian (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Substrate support assemblies may include an electrostatic chuck body defining a substrate support surface that defines a substrate seat. Assemblies may include a support stem co...