US Patent Issued to Applied Materials on March 17 for "Faraday faceplate" (California Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,581,880, issued on March 17, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Faraday faceplate" was invented by Rutvij Naik (San Jose, Calif.), Vijay Sarthy Mysore Sreedhara (Redwood City, Calif.), Xiaopu Li (San Jose, Calif.), Shawyon Jafari (Sunnyvale, Calif.), Chidambara A. Ramalingam (Fremont, Calif.), Edward P. Hammond (Hillsborough, Calif.) and Juan Carlos Rocha-Alvarez (San Carlos, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Exemplary semiconductor processing chamber faceplates may include a body having a first surface and a second surface opposite the first surface. The body may define a plurality of apertures that exte...