ALEXANDRIA, Va., March 17 -- United States Patent no. 12,576,475, issued on March 17, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Determining the orientation of a substrate in-situ" was invented by Wei Lu (Fremont, Calif.), Shih-Haur Shen (Santa Clara, Calif.), David Maxwell Gage (San Jose, Calif.), Jimin Zhang (San Jose, Calif.), Taketo Sekine (Cuppertino, Calif.), Haosheng Wu (Fremont, Calif.), Kun Xu (Fremont, Calif.), Jianshe Tang (San Jose, Calif.) and Brian J. Brown (Palo Alto, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method of processing a substrate includes polishing a front surface of a substrate on a first pad coupled to a first platen. The method further includes ...