US Patent Issued to Applied Materials on March 17 for "Ampoule for a semiconductor manufacturing precursor" (California Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,577,663, issued on March 17, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Ampoule for a semiconductor manufacturing precursor" was invented by William J. Durand (Oakland, Calif.), Kenric Choi (San Jose, Calif.) and Garry K. Kwong (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Ampoules for a semiconductor manufacturing precursors and methods of use are described. The ampoules include a container with an inlet port and an outlet port. Alternating first and second elongate walls in the container are arranged to define longitudinal flow channels containing a precursor material, and alternating first and second passages b...