US Patent Issued to Applied Materials on June 30 for "Integrated substrate measurement system" (American, Indian Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,672,514, issued on June 30, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Integrated substrate measurement system" was invented by Patricia Schulze (Giddings, Texas), Gregory John Freeman (Austin, Texas), Michael Kutney (Santa Clara, Calif.), Arunkumar Ramachandraiah (Bengaluru, India), Chih Chung Chou (San Jose, Calif.), Zhaozhao Zhu (Milpitas, Calif.) and Ozkan Celik (Cedar Park, Texas).

According to the abstract* released by the U.S. Patent & Trademark Office: "An optical measurement device comprises a substrate holder to secure a substrate, a plurality of actuators to move the substrate holder relative to a plurality of axes, a first sensor to generate one or mor...