US Patent Issued to Applied Materials on June 3 for "Resistivity-based adjustment of thresholds for in-situ monitoring" (California Inventors)

ALEXANDRIA, Va., June 4 -- United States Patent no. 12,320,883, issued on June 3, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Resistivity-based adjustment of thresholds for in-situ monitoring" was invented by Kun Xu (Sunol, Calif.), Ingemar Carlsson (Milpitas, Calif.), Shih-Haur Shen (Sunnyvale, Calif.), Boguslaw A. Swedek (Morgan Hill, Calif.) and Tzu-Yu Liu (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A first resistivity value and a correlation function relating thickness of a conductive layer having the first resistivity value to a signal from an in-situ monitoring system are stored. A second resistivity value for a conductive layer on a substrate is received. A sequ...