US Patent Issued to APPLIED MATERIALS on June 3 for "Refillable large volume solid precursor sublimation vessel" (Arizona Inventors)

ALEXANDRIA, Va., June 4 -- United States Patent no. 12,319,999, issued on June 3, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.).

"Refillable large volume solid precursor sublimation vessel" was invented by Carl Louis White (Gilbert, Ariz.), Mohith Eipe Verghese (Phoenix) and David Thomas Marquardt (Scottsdale, Ariz.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of a solid chemical delivery system having a refillable sublimation vessel are provided herein. In some embodiments, a solid chemical delivery system includes: a refillable sublimation vessel including: a vessel body coupled to a vessel lid to define an interior volume of the refillable sublimation vessel, wherein the vesse...