US Patent Issued to APPLIED MATERIALS on June 23 for "Chamber kits, systems, and methods for calibrating temperature sensors for semiconductor manufacturing" (California Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,663,315, issued on June 23, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.).

"Chamber kits, systems, and methods for calibrating temperature sensors for semiconductor manufacturing" was invented by Zhepeng Cong (San Jose, Calif.), Tao Sheng (Santa Clara, Calif.), Khokan C. Paul (Cupertino, Calif.), Ashur J. Atanos (San Jose, Calif.), Nimrod Smith (Cupertino, Calif.) and Vinh N. Tran (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to chamber kits, systems, and methods for calibrating temperature sensors for semiconductor manufacturing. In one or more embodiments, a chamber kit for processing ch...