ALEXANDRIA, Va., June 2 -- United States Patent no. 12,644,183, issued on June 2, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Showerhead assembly with heated showerhead" was invented by Anantha K. Subramani (San Jose, Calif.), Seyyed Abdolreza Fazeli (Santa Clara, Calif.), Yang Guo (San Mateo, Calif.), Chandrashekara Baginagere (Bangalore, India), Ramcharan Sundar (Bangalore, India), Steven Mosbrucker (Sunnyvale, Calif.), John Lee (Sunnyvale, Calif.), Yiyang Wan (Sunnyvale, Calif.), Shumao Zhang (San Jose, Calif.), Dhritiman Subha Kashyap (Bangalore, India) and Azhar Ali M.A (Bangalore, India).

According to the abstract* released by the U.S. Patent & Trademark Office: "In some embodiments, a showerhead assembly includes...