US Patent Issued to Applied Materials on June 2 for "Gas distribution apparatuses for improving mixing uniformity" (Indian, American Inventors)

ALEXANDRIA, Va., June 2 -- United States Patent no. 12,644,182, issued on June 2, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Gas distribution apparatuses for improving mixing uniformity" was invented by Youngki Chang (Santa Clara, Calif.), Dhritiman Subha Kashyap (Murugeshpalya, India), Rakesh Ramadas (San Jose, Calif.), Ashutosh Agarwal (San Jose, Calif.), Shashidhara Patel H B (Bangalore, India), Muhannad Mustafa (Milpitas, Calif.) and Sanjeev Baluja (Campbell, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Gas distribution apparatuses described herein include a mixing plate adjacent a back plate of a showerhead. The mixing plate has a back surface and a front surface defining a ...