US Patent Issued to Applied Materials on July 28 for "Rotary electrical feedthrough integration for process chamber" (California Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,692,592, issued on July 28, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Rotary electrical feedthrough integration for process chamber" was invented by Anantha Subramani (San Jose, Calif.), Yang Guo (Fremont, Calif.), John Forster (Santa Clara, Calif.), Wade Harrelson (Santa Clara, Calif.), Andrew Tomko (Sunnyvale, Calif.), Anthony Chan (Santa Clara, Calif.), Sathya Swaroop Ganta (Sunnyvale, Calif.), Mike Murtagh (Santa Clara, Calif.) and Sanjeev Baluja (Campbell, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments disclosed herein include semiconductor processing tools. In an embodiment, the semiconductor processing tool...