US Patent Issued to Applied Materials on July 28 for "Methods and mechanisms for coupling sensors to transfer chamber robot" (California, Texas Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,696,728, issued on July 28, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Methods and mechanisms for coupling sensors to transfer chamber robot" was invented by Phillip Criminale (Liberty Hill, Texas), Andrew Myles (Sunnyvale, Calif.), Chunlei Zhang (Santa Clara, Calif.), Vivek B. Shah (Santa Clara, Calif.) and Upendra Ummethala (Cupertino, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An electronic device manufacturing system includes a transfer chamber, a tool station situated within the transfer chamber, a process chamber coupled to the transfer chamber, and a transfer chamber robot. The transfer chamber robot is configured t...