US Patent Issued to Applied Materials on July 28 for "Compressive films for large area gapfill" (California Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,696,737, issued on July 28, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Compressive films for large area gapfill" was invented by Supriya Ghosh (San Jose, Calif.), Zeqing Shen (San Jose, Calif.), Susmit Singha Roy (Sunnyvale, Calif.) and Abhijit Basu Mallick (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Exemplary methods of semiconductor processing may include providing a silicon-containing precursor to a processing region of a semiconductor processing chamber. A substrate may be disposed within the semiconductor processing chamber. The methods may include forming a silicon-containing material on the substrate. The s...