US Patent Issued to Applied Materials on July 28 for "Apparatus and system for delivering gas to a process chamber" (California Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,692,601, issued on July 28, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Apparatus and system for delivering gas to a process chamber" was invented by Christopher S. Olsen (Fremont, Calif.), Lara Hawrylchak (Gilroy, Calif.), Tobin Kaufman-Osborn (Sunnyvale, Calif.) and Wenfei Zhang (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments described herein generally relate to a gas assembly disposed between a mainframe door and process chamber. The gas assembly provides multi-zone gas cross-flow distribution into a processing volume. Each of the zones are independently controlled. The zones each include a single nozzl...