US Patent Issued to Applied Materials on July 21 for "Forming mesas on an electrostatic chuck" (California Inventors)

ALEXANDRIA, Va., July 21 -- United States Patent no. 12,690,419, issued on July 21, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Forming mesas on an electrostatic chuck" was invented by Wendell Glenn Boyd Jr. (Morgan Hill, Calif.), Stanley Wu (San Ramon, Calif.) and Matthew Boyd (Morgan Hill, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A body of an electrostatic chuck comprises mesas disposed on a polished surface of the body. Each of the mesas comprises an adhesion layer disposed on the polished surface of the body, a transition layer disposed over the adhesion layer, and a coating layer disposed over the transition layer. The coating layer has a hardness of at least 14 GPa. The ...