US Patent Issued to Applied Materials on July 14 for "Susceptor for process chamber" (California Inventors)

ALEXANDRIA, Va., July 14 -- United States Patent no. 12,685,090, issued on July 14, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Susceptor for process chamber" was invented by Zhepeng Cong (San Jose, Calif.), Nimrod Smith (Cupertino, Calif.), Zuoming Zhu (Sunnyvale, Calif.) and Surendra Singh Srivastava (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate support assembly is provided including: a susceptor assembly that includes an inner portion having an inner body, an outer rim disposed around the inner body, and a plurality of recessed portions, each recessed portion recessed relative to a lower surface of the inner body; and an outer portion positioned around ...