ALEXANDRIA, Va., July 14 -- United States Patent no. 12,684,680, issued on July 14, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Low-k RF rod for RF bias power delivery" was invented by James Carducci (Sunnyvale, Calif.), Kiran Honnavar (Bangalore, India), Silverst Rodrigues (San Jose, Calif.), Kartik Ramaswamy (San Jose, Calif.) and Larry Elizaga (Tracy, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments described herein relate to an apparatus that includes an inner rod assembly. In an embodiment, the inner rod assembly includes a first rod and a second rod oriented approximately ninety degrees with respect to the first rod. In an embodiment, a bridge is electrically coupled...