US Patent Issued to Applied Materials on July 14 for "Electrostatic chuck with perforated or screened chucking electrode" (California Inventor)

ALEXANDRIA, Va., July 14 -- United States Patent no. 12,683,523, issued on July 14, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Electrostatic chuck with perforated or screened chucking electrode" was invented by Arvinder ManmohanSingh Chadha (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An electrostatic chuck includes a ceramic puck including a plurality of mesas configured to support a substrate. The electrostatic chuck further includes an electrode disposed within the ceramic puck. The electrode is configured to electrostatically clamp the substrate to the ceramic puck responsive to being energized with a clamping voltage. The electrode includes a plurality of perforat...