US Patent Issued to Applied Materials on July 14 for "Dielectric spectroscopy temperature monitoring using electrostatic chuck" (Massachusetts Inventor)

ALEXANDRIA, Va., July 14 -- United States Patent no. 12,685,084, issued on July 14, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Dielectric spectroscopy temperature monitoring using electrostatic chuck" was invented by Ori Noked (Brookline, Mass.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method and a system for determining a temperature of a substrate using a dielectric spectroscopy system. One or more impedance signals are received, where the impedance signals are generated by the substrate and one or more components of the dielectric spectroscopy system in response to one or more measurement signals. At least one first impedance signal is associated with one or more impedance signa...