US Patent Issued to Applied Materials on July 14 for "Convective substrate cooling with minimal pressure change" (California Inventor)

ALEXANDRIA, Va., July 14 -- United States Patent no. 12,680,761, issued on July 14, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Convective substrate cooling with minimal pressure change" was invented by Wolfgang R. Aderhold (Cupertino, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of the present disclosure generally relate to a reflector plate assembly. The reflector plate assembly includes a reflector plate and a baffle. The reflector plate includes a gas conduit, a plurality of gas passages, a plurality of lift pin holes, and a gas inlet. The gas conduit includes a first opening on a front side of the reflector plate and a second opening on a backside of the reflector...