US Patent Issued to Applied Materials on July 14 for "Axisymmetric heating assembly layout with double ended lamp" (American, Japanese, Indian Inventors)

ALEXANDRIA, Va., July 14 -- United States Patent no. 12,681,221, issued on July 14, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Axisymmetric heating assembly layout with double ended lamp" was invented by Shu-Kwan Lau (Sunnyvale, Calif.), Enle Choo (Saratoga, Calif.), Danny Don Wang (Saratoga, Calif.), Shainish Nellikka (Bangalore, India), Toshiyuki Nakagawa (Narita, Japan), Zhiyuan Ye (San Jose, Calif.) and Abhishek Dube (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Apparatus for heating a substrate within a substrate processing chamber are described herein. More specifically, possible lamp modules for use within a substrate processing chamber are described. The lamp mod...