US Patent Issued to Applied Materials on July 14 for "Apparatus and methods for controlling substrate temperature during processing" (American, Indian Inventors)

ALEXANDRIA, Va., July 14 -- United States Patent no. 12,683,131, issued on July 14, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Apparatus and methods for controlling substrate temperature during processing" was invented by Jian Li (Fremont, Calif.), Juan Carlos Rocha-Alvarez (San Carlos, Calif.), Vijay D. Parkhe (San Jose, Calif.), Wenhao Zhang (San Jose, Calif.) and Mayur Govind Kulkarni (Bangalore, India).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate support assembly includes a shaft with a platen extending perpendicularly from the shaft at an upper end of the shaft. The shaft includes an electric line and a plurality of coolant conduits. A cooling plate including a coolant c...