US Patent Issued to Applied Materials on July 14 for "Apparatus, systems, and methods of measuring edge ring distance for thermal processing chambers" (American, German Inventors)

ALEXANDRIA, Va., July 14 -- United States Patent no. 12,685,074, issued on July 14, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Apparatus, systems, and methods of measuring edge ring distance for thermal processing chambers" was invented by Ole Luckner (Dresden, Germany) and Wolfgang R. Aderhold (Cupertino, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Aspects of the present disclosure relate to apparatus, systems, and methods of measuring edge ring distance for thermal processing chambers. In one example, the distance measured is used to determine a center position shift of the edge ring."

The patent was filed on Feb. 26, 2024, under Application No. 18/587,724.

*For further info...