US Patent Issued to Applied Materials on Jan. 27 for "Sustainability monitoring platform with sensor support" (California Inventors)

ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,535,799, issued on Jan. 27, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Sustainability monitoring platform with sensor support" was invented by Ala Moradian (San Jose, Calif.), Aleksey Yanovich (Campbell, Calif.), Orlando Trejo (Santa Clara, Calif.), Elizabeth Neville (Sunnyvale, Calif.), Dinesh Saigal (San Jose, Calif.) and Umesh Madhav Kelkar (Cupertino, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "In embodiments, a method includes receiving, by a processing device, first sensor data generated by a plurality of sensors of a process chamber of a manufacturing system during execution of a fabrication process. The method inclu...