ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,537,173, issued on Jan. 27, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.).
"Substrate support pedestal" was invented by Steven Joseph Larosa (Mission Viejo, Calif.) and Stephen Prouty (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "The systems and methods discussed herein are associated with substrate support pedestals used in processing chambers to manufacture semiconductors, electronics, optics, and other devices. The substrate support pedestals include an electrostatic chuck body bonded to a cooling base via a bond layer. A gas flow passage is formed between a top surface of the electrostatic chuck body and a bottom su...