ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,535,363, issued on Jan. 27, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Radical sensor substrate" was invented by Chuang-Chia Lin (San Ramon, Calif.), Martin Hilkene (Gilroy, Calif.) and Amir Bayati (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments disclosed herein include sensor devices. In an embodiment, a sensor device comprises a substrate, a first sensor of a first type on the substrate, where a catalytic layer is provided as at least part of the first sensor, a second sensor of the first type on the substrate and adjacent to the first sensor, and a lid over the substrate, where an opening through the l...