US Patent Issued to Applied Materials on Jan. 27 for "Integrated wet clean for epitaxial growth" (California, Texas Inventors)

ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,538,737, issued on Jan. 27, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Integrated wet clean for epitaxial growth" was invented by Brian K. Kirkpatrick (Allen, Texas) and Uday Mitra (Cupertino, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Exemplary integrated cluster tools may include a factory interface including a first transfer robot. The tools may include a wet clean system coupled with the factory interface at a first side of the wet clean system. The tools may include a load lock chamber coupled with the wet clean system at a second side of the wet clean system opposite the first side of the wet clean system. The tools ...