US Patent Issued to Applied Materials on Feb. 24 for "Thermal choke plate" (Indian, American Inventors)

ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,563,991, issued on Feb. 24, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Thermal choke plate" was invented by Siva Chandrasekar (Tamil, India), Satish Radhakrishnan (San Jose, Calif.), Viren Kalsekar (Mountain View, Calif.), Vellaichamy Nagappan (Tamil, India) and Vinay K. Prabhakar (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Exemplary substrate processing systems may include a chamber body defining a transfer region. The systems may include a lid plate seated on the chamber body. The lid plate may define a first plurality of apertures and a second plurality of apertures. The systems may include a plurality of lid s...