US Patent Issued to Applied Materials on Feb. 24 for "Systems and methods to reduce flow accuracy error for liquid and gas mass flow controller devices" (California Inventors)

ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,563,992, issued on Feb. 24, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Systems and methods to reduce flow accuracy error for liquid and gas mass flow controller devices" was invented by Daemian Raj Benjamin Raj (Fremont, Calif.), Collen Leng (San Jose, Calif.), Syed A. Alam (San Jose, Calif.) and Tianyang Li (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Exemplary fluid delivery assemblies for a semiconductor processing system may include a liquid delivery source. The assemblies may include a heater that is fluidly coupled with an outlet of the liquid delivery source. The assemblies may include a liquid flow control...