US Patent Issued to Applied Materials on Feb. 24 for "Replaceable electrostatic chuck outer ring for edge arcing mitigation" (California Inventors)

ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,562,353, issued on Feb. 24, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Replaceable electrostatic chuck outer ring for edge arcing mitigation" was invented by Timothy Joseph Franklin (Campbell, Calif.), Jaeyong Cho (San Jose, Calif.), Alexander Sulyman (Santa Clara, Calif.), Xue Chang (San Jose, Calif.), Kartik Ramaswamy (San Jose, Calif.), Steven E. Babayan (Los Altos, Calif.), Anwar Husain (Pleasanton, Calif.) and David Coumou (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of the present disclosure herein include an apparatus for processing a substrate. More specifically, embodiments of this disclosu...