US Patent Issued to Applied Materials on Feb. 24 for "Method and apparatus for substrate temperature control" (Singaporean, American Inventors)

ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,564,014, issued on Feb. 24, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Method and apparatus for substrate temperature control" was invented by Yaoying Zhong (Singapore), Siew Kit Hoi (Singapore) and Bridger Earl Hoerner (Columbia Falls, Mont.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and apparatus for controlling substrate temperature includes: measuring a substrate that has undergone a deposition process; analyzing measurements of the substrate to detect a defect of the substrate; and sending a feedback signal to modify a temperature control parameter of a temperature controller used in controlling a temperature of the ...