US Patent Issued to Applied Materials on Feb. 24 for "Extreme edge sheath tunability with non-movable edge ring" (California Inventors)

ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,562,351, issued on Feb. 24, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Extreme edge sheath tunability with non-movable edge ring" was invented by Shreeram Jyoti Dash (San Jose, Calif.), Peter Muraoka (Santa Clara, Calif.) and Michael T. Nichols (Sunnyvale, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments described herein generally related to a substrate processing apparatus. In one embodiment, a process kit for a substrate processing chamber disclosed herein. The process kit includes an edge ring configured to circumscribe a substrate in the semiconductor processing chamber, at least one conductive pin electrically c...