ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,557,254, issued on Feb. 17, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Two-piece RF shield design" was invented by Vellaichamy Nagappan (Ramanathapuram, India), Viren Kalsekar (Sunnyvale, Calif.), Vinay K. Prabhakar (Fremont, Calif.), Siva Chandrasekar (Hosur, India), Satish Radhakrishnan (San Jose, Calif.), Rajath Kumar Lakkenahalli Hiriyannaiah (Bengaluru, India), Dharma Ratnam Srichurnam (Hyderabad, India) and Sumit Subhash Singh (Mumbai, India).
According to the abstract* released by the U.S. Patent & Trademark Office: "Exemplary semiconductor processing chambers may include a chamber body. The chambers may include a substrate support assembly disposed within ...