US Patent Issued to Applied Materials on Feb. 17 for "Systems and methods for slit valve control" (South Korean Inventors)

ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,553,524, issued on Feb. 17, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Systems and methods for slit valve control" was invented by YongJoo Lee (Seoul, South Korea), Jongmo Yeo (Seoul, South Korea), GunBum Lee (Gyeonggi-do, South Korea) and Kiduk Kim (Gyeonggi-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and apparatus for slit valve control are provided. In some embodiments, a slit valve system includes a slit valve body having an opening configured to permit passage of a substrate; a door in the valve body, configured to transition between an open position and a closed position in which the opening is closed...