US Patent Issued to Applied Materials on Feb. 10 for "Method and apparatus to enable droplet jet cleaning at elevated temperature" (California Inventors)

ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,544,805, issued on Feb. 10, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Method and apparatus to enable droplet jet cleaning at elevated temperature" was invented by Ying Wang (San Diego) and Eric J. Bergman (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of the disclosure include an apparatus and method of cleaning a substrate. The disclosure describes a method of cleaning a substrate includes supplying a gas at a gas temperature and a gas mass flow rate to a nozzle. The method also includes supplying a liquid at a liquid temperature and a liquid mass flow rate to the nozzle. The method also includes mi...