US Patent Issued to Applied Materials on Feb. 10 for "Corrosion resistant ground shield of processing chamber" (California Inventors)

ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,548,742, issued on Feb. 10, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Corrosion resistant ground shield of processing chamber" was invented by Dmitry Lubomirsky (Cupertino, Calif.), Xiao Ming He (Fremont, Calif.), Jennifer Y. Sun (Mountain View, Calif.), Xiaowei Wu (San Jose, Calif.), Laksheswar Kalita (San Jose, Calif.) and Soonam Park (Sunnyvale, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A ground shield of a processing chamber includes a ceramic body including a ground shield plate, a raised edge extending from an upper surface of the ground shield plate, and a hollow shaft that extends from a lower surface of the grou...