US Patent Issued to Applied Materials on Dec. 2 for "Temperature-based metrology calibration at a manufacturing system" (California Inventors)

ALEXANDRIA, Va., Dec. 2 -- United States Patent no. 12,489,005, issued on Dec. 2, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Temperature-based metrology calibration at a manufacturing system" was invented by Shifang Li (Pleasanton, Calif.), Yudong Hao (Fremont, Calif.), Xinyuan Chong (Milpitas, Calif.) and Chengqing Wang (Cupertino, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and systems for temperature-based metrology calibration at a manufacturing system are provided. First metrology data corresponding to one or more first temperatures associated with a substrate following a completion of one or more portions of a substrate process at a manufacturing system is obtained...