US Patent Issued to Applied Materials on Dec. 2 for "Extreme uniformity heated substrate support assembly" (California Inventors)

ALEXANDRIA, Va., Dec. 2 -- United States Patent no. 12,488,967, issued on Dec. 2, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Extreme uniformity heated substrate support assembly" was invented by David Benjaminson (Campbell, Calif.), Vijay D. Parkhe (San Jose, Calif.), Onkara Swamy Kora Siddaramaiah (Santa Clara, Calif.), Kirby H. Floyd (San Jose, Calif.), Justin Wang (Santa Clara, Calif.), Mehmet Tugrul Samir (Mountain View, Calif.) and Dmitry Lubomirsky (Cupertino, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Implementations described herein provide a substrate support assembly which enables temperature uniformity across a workpiece surface. In one embodiment, a substrate suppor...