US Patent Issued to Applied Materials on Aug. 4 for "Methods and systems to measure properties of moving products in device manufacturing machines" (American, Indian Inventors)

ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,699,049, issued on Aug. 4, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Methods and systems to measure properties of moving products in device manufacturing machines" was invented by Todd J. Egan (Fremont, Calif.), Avishek Ghosh (Maharashtra, India), Edward W. Budiarto (Fremont, Calif.) and Guoheng Zhao (Palo Alto, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Described are systems and techniques directed to optical inspection of moving products (wafers, substrates, films, patterns) that are being transported to or from processing chambers in device manufacturing systems. Implementations include a system that has a first source ...