US Patent Issued to Applied Materials on Aug. 4 for "Actively cooled gas line for ion source" (Massachusetts Inventors)

ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,700,565, issued on Aug. 4, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Actively cooled gas line for ion source" was invented by Adam M. McLaughlin (Merrimac, Mass.), Graham Wright (Newburyport, Mass.) and Mateo Navarro Goldaraz (Cambridge, Mass.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An actively cooled gas conduit for use with an ion source is disclosed. The gas conduit includes a gas channel and a cooling channel that may be adjacent to one another for at least a portion of the length of the gas channel. The gas conduit may be constructed by bonding two or more tubes together. Alternatively, the gas conduit may be constructed ...