US Patent Issued to Applied Materials on Aug. 25 for "Wideband TEM to TM01 mode converter for microwave plasma systems" (California Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,142, issued on Aug. 25, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Wideband TEM to TM01 mode converter for microwave plasma systems" was invented by Xiaokang Yang (Fremont, Calif.), Tza-Jing Gung (San Jose, Calif.), John C. Forster (Mountain View, Calif.) and Sanjeev Baluja (Campbell, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments described herein relate to an apparatus that includes a dielectric puck with a height between a first surface and a second surface. In an embodiment, the apparatus further includes a pin that is inserted into a hole into the first surface of the dielectric puck, where the pin is elect...