US Patent Issued to Applied Materials on Aug. 25 for "Systems, apparatus, and methods for monitoring plate temperature for semiconductor manufacturing" (California Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,716,777, issued on Aug. 25, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Systems, apparatus, and methods for monitoring plate temperature for semiconductor manufacturing" was invented by Zhepeng Cong (San Jose, Calif.), Nimrod Smith (Cupertino, Calif.), Ashur J. Atanos (San Jose, Calif.) and Tao Sheng (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to systems, apparatus, and methods for monitoring plate temperature for semiconductor manufacturing. In one or more embodiments, a system for processing substrates and applicable for semiconductor manufacturing includes a chamber body includ...