US Patent Issued to Applied Materials on Aug. 25 for "Multi-zone lamp heating for chemical vapor deposition" (American, Indian Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,721,089, issued on Aug. 25, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Multi-zone lamp heating for chemical vapor deposition" was invented by Tetsuya Ishikawa (San Jose, Calif.), Ala Moradian (San Jose, Calif.), Manjunath Subbanna (Bangalore, India), Kim Vellore (San Jose, Calif.), Matthew Miller (Newark, Calif.) and Michael Rice (Pleasanton, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments disclosed herein include a lamp module for a semiconductor processing chamber. In an embodiment, the lamp module plate comprises a back plate, a first ring that extends from the back plate, a second ring that extends from the back...