US Patent Issued to Applied Materials on Aug. 25 for "Heated lid for a process chamber" (Indian Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,721,087, issued on Aug. 25, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Heated lid for a process chamber" was invented by Shivaprakash Padadayya Hiremath (Bangalore, India), Hanish Kumar Panavalappil Kumarankutty (Bangalore, India), Kirubanandan Naina Shanmugam (Bangalore, India), Madhukar Krishna (Bengaluru, India), Sriharsha Dharmapura Sathyanarayanamurthy (Bengaluru, India) and Sriharish Srinivasan (Bangalore, India).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of heated lids for a process chamber are provided herein. In some embodiments, a heated lid includes: a body having a central region and a peripheral region, wh...