ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,709,803, issued on Aug. 18, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Precursor delivery system for semiconductor device formation" was invented by Shashidhara Patel H B (Bangalore, India), Nagaraj Naik (Bangalore, India) and Muhannad Mustafa (Milpitas, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of precursor delivery systems are described herein. The precursor delivery systems include a reservoir having a cylindrical body, a conical shaped inlet on a first end of the cylindrical body, and a conical shaped outlet on a second end of the cylindrical body. Each of the conical shaped inlet and the conical shaped ou...